Professor

FEI Lu

Title: Professor
Subject:
Phone: +86-021-62511070
Fax: +86-021-62524192
Email: lufei@mail.sim.ac.cn
Address: 865 Changning Road, Shanghai, China

HONORS AND AWARDED RESEARCH FUNDS

National 02 Key Science and Technology Project:“Development of 20-14nm node materials process technology and product”

RESEARCH EXPERIENCE

Focused on semiconductor silicon wafer manufacturing process and product development from crystal pulling, wafering to epi and SOI.

SELECTED PUBLICATIONS

Shi Cheng, Yongwei Chang, Nan Gao, Yemin Dong, Lu Fei, Xing Wei, Xi Wang, Radio-Frequency Characteristics of Partially Dielectric Removal HR-SOI and TR-SOI Substrates, Chinese Physics Letters, 2017(34): 068101

INVITED TALKS