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FABRICATING METHOD OF COPPER INTERCONNECTION STRUCTURE WITH MIM CAPACITOR AND STRUCTURE FABRICATED THEREBY
Name:
FABRICATING METHOD OF COPPER INTERCONNECTION STRUCTURE WITH MIM CAPACITOR AND STRUCTURE FABRICATED THEREBY
The patent category:
Application number:
PCT/CN2010/075146
Application date:
2010/7/14
First inventor:
XIAO, Deyuan
Other inventors:
HUANG, Xiaolu
Other note:
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