MANUFACTURING METHOD OF EPITAXIAL DIODE ARRAY WITH DUAL SHALLOW TRENCH ISOLATIONS
| Name: |
MANUFACTURING METHOD OF EPITAXIAL DIODE ARRAY WITH DUAL SHALLOW TRENCH ISOLATIONS |
| The patent category: |
|
| Application number: |
PCT/CN2011/076238 |
| Application date: |
2011/6/23 |
| First inventor: |
ZHANG, Chao |
| Other inventors: |
SONG, Zhitang;WAN, Xudong;LIU, Bo;WU, Guanping;ZHANG, Ting;YANG, Zuoya;XIE, Zhifeng |
| Other note: |
|
|