GERMANIUM AND Ⅲ-Ⅴ MIXED COPLANAR SILICON ON INSULATOR (SOI) SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
| Name: |
GERMANIUM AND Ⅲ-Ⅴ MIXED COPLANAR SILICON ON INSULATOR (SOI) SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF |
| The patent category: |
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| Application number: |
PCT/CN2012/075548 |
| Application date: |
2012/5/16 |
| First inventor: |
DI, Zengfeng |
| Other inventors: |
BIAN, Jiantao;ZHANG, Miao;WANG, Xi |
| Other note: |
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