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METHOD FOR FABRICATING SOI SUBSTRATE WITH ALL ISOLATION AND HYBRID CRYSTAL ORIENTATION
Name:
METHOD FOR FABRICATING SOI SUBSTRATE WITH ALL ISOLATION AND HYBRID CRYSTAL ORIENTATION
The patent category:
Application number:
PCT/CN2012/075554
Application date:
2012/5/16
First inventor:
BIAN, Jiantao
Other inventors:
DI, Zengfeng;ZHANG, Miao
Other note:
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