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A METHOD FOR IMPROVING THE RELIABILITY IN THICK BCB APPLICATION UTILIZING BCB LITHOGRAPHY
Name:
A METHOD FOR IMPROVING THE RELIABILITY IN THICK BCB APPLICATION UTILIZING BCB LITHOGRAPHY
The patent category:
Application number:
PCT/CN2012/076873
Application date:
2012/6/14
First inventor:
TANG, Jiajie
Other inventors:
LUO, Le;XU, Gaowei
Other note:
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