METHOD FOR PREPARING ULTRATHIN ON-INSULATOR MATERIAL USING ADSORPTION OF DOPED ULTRATHIN LAYER
| Name: |
METHOD FOR PREPARING ULTRATHIN ON-INSULATOR MATERIAL USING ADSORPTION OF DOPED ULTRATHIN LAYER |
| The patent category: |
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| Application number: |
PCT/CN2012/081894 |
| Application date: |
2012/9/25 |
| First inventor: |
DI, Zengfeng |
| Other inventors: |
CHEN, Da;BIAN, Jiantao;XUE, Zhongying;ZHANG, Miao |
| Other note: |
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