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CAPACITIVE ACCELEROMETER OF H-SHAPED BEAM AND MANUFACTURING METHOD
Name:
CAPACITIVE ACCELEROMETER OF H-SHAPED BEAM AND MANUFACTURING METHOD
The patent category:
Application number:
PCT/CN2012/085723
Application date:
2012/12/3
First inventor:
CHE, Lufeng
Other inventors:
ZHOU, Xiaofeng;XIONG, Bin;WANG, Yuelin
Other note:
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