Patents
CAPACITIVE ACCELEROMETER OF BENT FLEXIBLE BEAM AND MANUFACTURING METHOD
Name: CAPACITIVE ACCELEROMETER OF BENT FLEXIBLE BEAM AND MANUFACTURING METHOD
The patent category:
Application number: PCT/CN2012/085811
Application date: 2012/12/4
First inventor: CHE, Lufeng
Other inventors: ZHOU, Xiaofeng; WANG, Yuelin
Other note: