METHOD OF MANUFACTURING SOI-BASED SIGE-HBT TRANSISTOR
Name: |
METHOD OF MANUFACTURING SOI-BASED SIGE-HBT TRANSISTOR |
The patent category: |
|
Application number: |
PCT/CN2012/087731 |
Application date: |
2012/12/27 |
First inventor: |
CHAI, Zhan |
Other inventors: |
CHEN, Jing;LUO, Jiexin;WU, Qingqing;WANG, Xi |
Other note: |
|
|