Preparation method of Large Size III-V Heterogeneous Substrate
Name: |
Preparation method of Large Size III-V Heterogeneous Substrate |
The patent category: |
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Application number: |
PCT/CN2017/094041 |
Application date: |
2017/7/24 |
First inventor: |
OU, Xin |
Other inventors: |
GONG, Qian;YOU, Tiangui;HUANG, Kai;LIN, Jiajie;ZHANG, Runchun |
Other note: |
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