METHOD OF DEPOSITING GATE DIELECTRIC, METHOD OF PREPARING MIS CAPACITOR, AND MIS CAPACITOR
| Name: |
METHOD OF DEPOSITING GATE DIELECTRIC, METHOD OF PREPARING MIS CAPACITOR, AND MIS CAPACITOR |
| The patent category: |
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| Application number: |
13128914 |
| Application date: |
2010/9/8 |
| First inventor: |
CHEN, Jing |
| Other inventors: |
LUO, Jiexin;WU, Qingqing;HUANG, Xiaolu; WANG, Xi |
| Other note: |
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