METHOD OF DEPOSITING GATE DIELECTRIC, METHOD OF PREPARING MIS CAPACITOR, AND MIS CAPACITOR
| Name: |
METHOD OF DEPOSITING GATE DIELECTRIC, METHOD OF PREPARING MIS CAPACITOR, AND MIS CAPACITOR |
| The patent category: |
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| Application number: |
13256435 |
| Application date: |
2011/6/8 |
| First inventor: |
CHENG, Xinhong |
| Other inventors: |
XU, Dawei;WANG, Zhongjian;XIA, Chao;HE, Dawei;SONG, Zhaorui;YU, Yuehui |
| Other note: |
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