Patents
METHOD OF EPITAXIAL GROWTH EFFECTIVELY PREVENTING AUTO-DOPING EFFECT
Name: METHOD OF EPITAXIAL GROWTH EFFECTIVELY PREVENTING AUTO-DOPING EFFECT
The patent category:
Application number: 13202944
Application date: 2011/6/27
First inventor: ZHANG, Chao
Other inventors: SONG, Zhitang;WAN, Xudong;LIU, Bo;WU, Guanping;ZHANG, Ting;YANG, Zuoya;XIE, Zhifeng
Other note: