METHOD OF EPITAXIAL GROWTH EFFECTIVELY PREVENTING AUTO-DOPING EFFECT
Name: |
METHOD OF EPITAXIAL GROWTH EFFECTIVELY PREVENTING AUTO-DOPING EFFECT |
The patent category: |
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Application number: |
13202944 |
Application date: |
2011/6/27 |
First inventor: |
ZHANG, Chao |
Other inventors: |
SONG, Zhitang;WAN, Xudong;LIU, Bo;WU, Guanping;ZHANG, Ting;YANG, Zuoya;XIE, Zhifeng |
Other note: |
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