Phase-Change Storage Unit Containing TiSiN Material Layer And Method For Preparing The Same
| Name: |
Phase-Change Storage Unit Containing TiSiN Material Layer And Method For Preparing The Same |
| The patent category: |
|
| Application number: |
14123454 |
| Application date: |
2012/12/27 |
| First inventor: |
SONG, Zhitang |
| Other inventors: |
GONG, Yuefeng;RAO, Feng;LIU, Bo;KANG, Yong;CHEN, Bangming |
| Other note: |
|
|