Local-area carbon supply device and method for manufacturing wafer-level graphene monocrystalline based on local-area carbon supply
| Name: |
Local-area carbon supply device and method for manufacturing wafer-level graphene monocrystalline based on local-area carbon supply |
| The patent category: |
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| Application number: |
JP2016-519973 |
| Application date: |
2016/4/4 |
| First inventor: |
WU, Tianru |
| Other inventors: |
ZHANG, Xuefu;LU, Guangyuan;YANG, Chao;WANG, Haomin;XIE, Xiaoming;JIANG, Mianheng |
| Other note: |
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